Items where Author is "Castellanos, Sonia"
Jump to: Conference or Workshop Item Number of items: 1. Conference or Workshop ItemCastellanos, Sonia and Wu, Lianjia and Baljozovic, Milos and Portale, Giuseppe and Kazazis, Dimitrios and Vockenhuber, Michaela and Ekinci, Yasin and Jung, Thomas. (2018) Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists. In: Proceedings of SPIE, 11. Bellingham, Wash.. |
