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Items where Author is "Castellanos, Sonia"

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Jump to: 2018
Number of items: 1.

2018

Castellanos, Sonia and Wu, Lianjia and Baljozovic, Milos and Portale, Giuseppe and Kazazis, Dimitrios and Vockenhuber, Michaela and Ekinci, Yasin and Jung, Thomas. (2018) Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists. In: Proceedings of SPIE, 11. Bellingham, Wash..

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