Items where Author is "Castellanos, Sonia"
Jump to: Yes Number of items: 1. YesCastellanos, Sonia and Wu, Lianjia and Baljozovic, Milos and Portale, Giuseppe and Kazazis, Dimitrios and Vockenhuber, Michaela and Ekinci, Yasin and Jung, Thomas. (2018) Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists. In: Proceedings of SPIE, 11. Bellingham, Wash.. |
