Items where Author is "Mortelmans, Thomas"

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Mortelmans, Thomas and Kazazis, Dimitrios and Guzenko, Vitaliy A. and Padeste, Celestino and Braun, Thomas and Stahlberg, Henning and Li, Xiaodan and Ekinci, Yasin. (2020) Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning. Microelectronic Engineering, 225. p. 111272.

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