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Items where Author is "Guzenko, Vitaliy A."

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Group by: Date | Item Type | Refereed
Jump to: 2020
Number of items: 3.

2020

Thakkar, Pooja and Guzenko, Vitaliy A. and Lu, Peng-Han and Dunin-Borkowski, Rafal E. and Abrahams, Jan Pieter and Tsujino, Soichiro. (2020) Fabrication of low aspect ratio three-element Boersch phase shifters for voltage-controlled three electron beam interference. Journal of Applied Physics, 128 (13). p. 134502.

Mortelmans, Thomas and Kazazis, Dimitrios and Guzenko, Vitaliy A. and Padeste, Celestino and Braun, Thomas and Stahlberg, Henning and Li, Xiaodan and Ekinci, Yasin. (2020) Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning. Microelectronic Engineering, 225. p. 111272.

Roesner, Benedikt and Finizio, Simone and Koch, Frieder and Doring, Florian and Guzenko, Vitaliy A. and Langer, Manuel and Kirk, Eugenie and Watts, Benjamin and Meyer, Markus and Ornelas, Joshua Lorona and Spaeth, Andreas and Stanescu, Stefan and Swaraj, Sufal and Belkhou, Rachid and Ishikawa, Takashi and Keller, Thomas F. and Gross, Boris and Poggio, Martino and Fink, Rainer H. and Raabe, Joerg and Kleibert, Armin and David, Christian. (2020) Soft x-ray microscopy with 7 nm resolution. Optica, 7 (11). pp. 1602-1608.

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