Ultra-fine particulate detection using mode-localized MEMS resonators

Chellasivalingam, Malar and Pandit, Milind and Kalberer, Markus and Seshia, Ashwin A.. (2019) Ultra-fine particulate detection using mode-localized MEMS resonators. In: 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC).

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Official URL: https://edoc.unibas.ch/74508/

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This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant frequency shift-based detection approach. Weakly coupled MEMS resonators demonstrated in this paper demonstrate sensitivity to fine particulates and a significant improvement in mass sensitivity for particulate quantification by employing an amplitude ratio shift output metric.
Faculties and Departments:05 Faculty of Science > Departement Umweltwissenschaften > Geowissenschaften > Atmospheric Sciences (Kalberer)
UniBasel Contributors:Kalberer, Markus
Item Type:Conference or Workshop Item, refereed
Conference or workshop item Subtype:Conference Paper
Note:Publication type according to Uni Basel Research Database: Conference paper
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Last Modified:10 Mar 2020 13:56
Deposited On:10 Mar 2020 13:56

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