Sensor system including silicon nanowire ion sensitive FET arrays and CMOS readout

Livi, Paolo and Shadmani, Amir and Wipf, Mathias and Stoop, Ralph L. and Rothe, Joerg and Chen, Yihui and Calame, Michel and Schönenberger, Christian and Hierlemann, Andreas. (2014) Sensor system including silicon nanowire ion sensitive FET arrays and CMOS readout. Sensors and actuators. B, Chemical, Vol. 204. pp. 568-577.

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Official URL: http://edoc.unibas.ch/dok/A6338961

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We present a highly sensitive chemical sensor system including a chip with an array of silicon nanowire ISFETs and a CMOS chip with custom-designed signal-conditioning circuitry. The CMOS circuitry, comprising 8 sigma-delta (Sigma-Delta) modulators and 8 current-to-frequency converters, has been interfaced to each of the nanowires to apply a constant voltage for measuring the respective current through the nanowire. Each nanowire has a dedicated readout channel, so that no multiplexing is required, which helps to avoid leakage current issues. The analog signal has been digitized on chip and transmitted to a host PC via a FPGA. The system has been successfully fabricated and tested and features, depending on the settings, noise values as low as 8.2 pA(RMS) and a resolution of 13.3 bits while covering an input current range from 200 pA to 3 mu A. The two readout architectures (Sigma-Delta and current to frequency) have been compared, and measurements showing the advantages of combining a CMOS readout with silicon nanowire sensors are presented: (1) simultaneous readout of different silicon nanowires for high-temporal-resolution experiments and parallel sensor experiments (results from pH and KCl concentration sweeps are presented); (2) high speed measurements showing how the CMOS chip can enhance the performance of the nanowire sensors by compensating its non-idealities as a consequence of hysteresis. (C) 2014 Elsevier B.V. All rights reserved.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Experimentalphysik Nanoelektronik (Schönenberger)
UniBasel Contributors:Schönenberger, Christian and Wipf, Mathias and Stoop, Ralph and Calame, Michel
Item Type:Article, refereed
Article Subtype:Research Article
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:06 Feb 2015 09:59
Deposited On:06 Feb 2015 09:59

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