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A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

Lang, H. P. and Berger, R. and Battiston, F. and Ramseyer, J. P. and Meyer, E. and Andreoli, C. and Brugger, J. and Vettiger, P. and Despont, M. and Mezzacasa, T. and Scandella, L. and Guntherodt, H. J. and Gerber, C. and Gimzewski, J. K.. (1998) A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors. Applied physics. A, Materials science & processing, Vol. 66, Part 1 Suppl. S , S61-S64.

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Official URL: http://edoc.unibas.ch/dok/A5839455

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Abstract

We have built and operated a novel setup for the characterization and identification of gases or vapors based on sequential position readout via a beam-deflection technique from a microfabricated array of eight cantilever-type sensors. Each of the cantilevers can be coated on one side with a different sensor material to detect specific chemical interactions. We demonstrate that disturbances from vibrations and turbulent gas flow can be effectively removed in array sensors by taking difference signals with reference cantilevers. For example, H-2 can be detected by its adsorption on a Pt-coated sensor because a change in surface stress causes a static bending of the sensor. The diffusion of various alcohols into polymethylmethacrylate induces resonance frequency shifts in a dynamic measuring mode and bending in the static mode, which allows one to distinguish between the various alcohols.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Bibsysno:Link to catalogue
Publisher:Springer-Verlag
ISSN:1432-0630
Note:Publication type according to Uni Basel Research Database: Journal article
Identification Number:
Last Modified:14 Sep 2012 07:18
Deposited On:14 Sep 2012 06:45

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