Items where Author is "Vockenhuber, Michaela"
Jump to: 2018 Number of items: 2. 2018Zhang, Yu and Haitjema, Jarich and Baljozovic, Milos and Vockenhuber, Michaela and Kazazis, Dimitrios and Jung, Thomas A. and Ekinci, Yasin and Brouwer, Albert M.. (2018) Dual-tone Application of a Tin-Oxo Cage Photoresist Under E-beam and EUV Exposure. Journal of Photopolymer Science and Technology, 31 (2). pp. 249-255. Castellanos, Sonia and Wu, Lianjia and Baljozovic, Milos and Portale, Giuseppe and Kazazis, Dimitrios and Vockenhuber, Michaela and Ekinci, Yasin and Jung, Thomas. (2018) Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists. In: Proceedings of SPIE, 11. Bellingham, Wash.. |
