Items where Author is "Kazazis, Dimitrios"
Number of items: 3. 2020Mortelmans, Thomas and Kazazis, Dimitrios and Guzenko, Vitaliy A. and Padeste, Celestino and Braun, Thomas and Stahlberg, Henning and Li, Xiaodan and Ekinci, Yasin. (2020) Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning. Microelectronic Engineering, 225. p. 111272. 2018Zhang, Yu and Haitjema, Jarich and Baljozovic, Milos and Vockenhuber, Michaela and Kazazis, Dimitrios and Jung, Thomas A. and Ekinci, Yasin and Brouwer, Albert M.. (2018) Dual-tone Application of a Tin-Oxo Cage Photoresist Under E-beam and EUV Exposure. Journal of Photopolymer Science and Technology, 31 (2). pp. 249-255. Castellanos, Sonia and Wu, Lianjia and Baljozovic, Milos and Portale, Giuseppe and Kazazis, Dimitrios and Vockenhuber, Michaela and Ekinci, Yasin and Jung, Thomas. (2018) Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists. In: Proceedings of SPIE, 11. Bellingham, Wash.. |
