Multifunctional probe microscope for facile operation in ultrahigh-vacuum

A scanning force/tunneling microscope (SFM/STM) for remote controlled operation in ultrahigh vacuum (UHV) is described. The lateral forces, normal forces, and tunneling currents between probe tip and sample can all be measured simultaneously. The optical beam deflection detector and the sample position can be adjusted by means of three compact inertial stepping motors. An UHV-compatible light emitting diode is introduced as a general alternative to the widely used laser diode in the detector. Images, taken at 5 X 10(-11) mbar on Si(111) with STM and noncontact SFM, and on NaF(001) with contact SFM, are presented.