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Kelvin probe force microscopy for material characterization

Glatzel, Thilo and Gysin, Urs and Meyer, Ernst. (2022) Kelvin probe force microscopy for material characterization. Microscopy, 71 (Supplement_1). i165-i173.

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Official URL: https://edoc.unibas.ch/88096/

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Abstract

Kelvin probe force microscopy is a scanning probe method for imaging the surface potential by atomic force microscopy. The surface potential is one of the most important surface properties and is correlated to e.g. the work function, surface dipoles, localized surface charges and structural properties. It gives detailed information on the electrical properties and can be combined with optical and electrical excitation mechanisms providing additional properties like surface band bending and charge carrier mobilities. We will introduce the main concept and will briefly describe the major methods of operation. Based on the analysis of a Si superjunction device, structures dopant profiling and the concept of surface photovoltage measurements will be introduced. The influence of local charge accumulation on these devices will be presented and the effect on the measured contact potential values will be discussed.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Glatzel, Thilo
Item Type:Article, refereed
Article Subtype:Research Article
Publisher:Oxford University Press
ISSN:2050-5698
e-ISSN:2050-5701
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:13 Apr 2022 09:47
Deposited On:13 Apr 2022 09:47

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