Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen

Park, K. K. and Lee, H. J. and Yaralioglu, G. G. and Ergun, A. S. and Oralkan, Ö. and Kupnik, M. and Quate, C. F. and Khuri-Yakub, B. T. and Braun, T. and Ramseyer, J. -P. and Lang, H. P. and Hegner, M. and Gerber, Ch. and Gimzewski, J. K.. (2007) Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen. Applied Physics Letters, 91 (9). 094102.

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Official URL: https://edoc.unibas.ch/83883/

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The authors present the prototype of a chemical sensor using a capacitive micromachined ultrasonic transducer array. Each element in the array consists of a large number of resonating membranes connected in parallel. A five-channel oscillator circuit operates at the resonant frequency around 6 MHz in this prototype. The surface of the elements in the array is coated by polymers such as polyallylamine hydrochloride, polyethylene glycol, and polyvinyl alcohol to detect different chemicals. By measuring shift in oscillation frequencies due to the mass-loading effect, analytes, e.g., water and isopropanol, with concentrations around 20 ppbv (parts per 10(9) by volume) range can be detected. (C) 2007 American Institute of Physics.
Faculties and Departments:05 Faculty of Science > Departement Biozentrum > Structural Biology & Biophysics > Structural Biology (Braun)
UniBasel Contributors:Braun, Thomas
Item Type:Article, refereed
Article Subtype:Research Article
Publisher:AIP Publishing
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:06 Oct 2021 12:27
Deposited On:06 Oct 2021 12:27

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