Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies

Challier, Michel and Sonusen, Selda and Barfuss, Arne and Rohner, Dominik and Riedel, Daniel and Koelbl, Johannes and Ganzhorn, Marc and Appel, Patrick and Maletinsky, Patrick and Neu, Elke. (2018) Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies. MICROMACHINES, 9 (4).

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Official URL: https://edoc.unibas.ch/68802/

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Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free- standing membranes with a thickness ranging from several micrometers to the few 100nm range. In this work, we present an approach to conveniently fabricate such thin membranes with up to about one millimeter in size. We use commercially available diamond plates (thickness 50 mu m) in an inductively coupled reactive ion etching process which is based on argon, oxygen and SF6. We thus avoid using toxic, corrosive feed gases and add an alternative to previously presented recipes involving chlorine-based etching steps. Our membranes are smooth (RMS roughness < 1 nm) and show moderate thickness variation (central part: < 1 mu m over approximate to 200 x 200 mu m(2)). Due to an improved etch mask geometry, our membranes stay reliably attached to the diamond plate in our chlorine-based as well as SF6-based processes. Our results thus open the route towards higher reliability in diamond device fabrication and up-scaling.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Georg H. Endress-Stiftungsprofessur für Experimentalphysik (Maletinsky)
UniBasel Contributors:Maletinsky, Patrick M.
Item Type:Article, refereed
Article Subtype:Research Article
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:11 Apr 2019 18:44
Deposited On:11 Apr 2019 18:44

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