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Fabrication of mirror templates in silica with micron-sized radii of curvature

Najer, Daniel and Renggli, Martina and Riedel, Daniel and Starosielec, Sebastian and Warburton, Richard J. . (2017) Fabrication of mirror templates in silica with micron-sized radii of curvature. Applied Physics Letters, 110. 011101.

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Official URL: http://edoc.unibas.ch/52517/

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Abstract

We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with a radius of curvature ≲5 μm at shallow depth and low surface roughness of 2 Å. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structures within a tunable Fabry-Pérot type microcavity and demonstrate near-coating-limited loss rates (ℱ=25  000) and small focal lengths consistent with their geometrical dimensions.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Experimental Physics (Warburton)
UniBasel Contributors:Warburton, Richard J and Najer, Daniel and Riedel, Daniel and Starosielec, Sebastian
Item Type:Article, refereed
Article Subtype:Research Article
Publisher:AIP Publishing
ISSN:0003-6951
e-ISSN:1077-3118
Note:Publication type according to Uni Basel Research Database: Journal article
Language:English
Identification Number:
Last Modified:01 Mar 2017 13:09
Deposited On:01 Mar 2017 13:09

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