Laser micro-fabrication of concave, low-roughness features in silica

Hunger, D. and Deutsch, C. and Barbour, R. J. and Warburton, R. J. and Reichel, J.. (2012) Laser micro-fabrication of concave, low-roughness features in silica. AIP Advances, Vol. 2, H. 1 , 012119.

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Official URL: http://edoc.unibas.ch/dok/A6083408

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We describe a micro-fabrication method to create concave features with ultra-low roughness in silica, either on optical fibers or on flat substrates. The machining uses a single CO2 laser pulse train. Parameters are chosen such that evaporation removes material while a low-viscosity melt layer produces excellent surface quality. A surface roughness sigma similar to 0.2 nm is regularly obtained. The concave depressions are near-spherical close to the center with radii of curvature between 20 and 2000 mu m. The method allows fabrication of low-scatter micro-optical devices such as mirror substrates for high-finesse cavities or negative lenses on fiber tips, extending the range of micro-optical components.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Experimental Physics (Warburton)
UniBasel Contributors:Warburton, Richard J
Item Type:Article, refereed
Article Subtype:Research Article
Publisher:American Inst. of Physics
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:24 May 2013 09:22
Deposited On:24 May 2013 09:03

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