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Sequential position readout from arrays of micromechanical cantilever sensors

Lang, H. P. and Berger, R. and Andreoli, C. and Brugger, J. and Despont, M. and Vettiger, P. and Gerber, C. and Gimzewski, J. K. and Ramseyer, J. P. and Meyer, E. and Guntherodt, H. J.. (1998) Sequential position readout from arrays of micromechanical cantilever sensors. Applied physics letters, Vol. 72, H. 3. pp. 383-385.

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Official URL: http://edoc.unibas.ch/dok/A5839463

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Abstract

Sequential position readout from a microfabricated array of eight cantilever-type sensors (silicon technology) is demonstrated. In comparison with single sensors we find that mechanical disturbances from noise, such as from vibrations, turbulent gas flow, or abrupt pressure changes, can be effectively removed in array sensors by recording difference signals with respect to reference cantilevers. We demonstrate that chemically specific responses can be extracted in a noisy environment using a sensor to detect specific chemical interactions and an uncoated cantilever as reference. (C) 1998 American Institute of Physics.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Bibsysno:Link to catalogue
Publisher:American Institute of Physics
ISSN:0003-6951
Note:Publication type according to Uni Basel Research Database: Journal article
Identification Number:
Last Modified:14 Sep 2012 07:18
Deposited On:14 Sep 2012 06:44

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