edoc

Scanning probe microscopy for nanometer inspections and industrial applications

Gutmannsbauer, W. and Hug, H. J. and Meyer, E.. (1996) Scanning probe microscopy for nanometer inspections and industrial applications. Microelectronic engineering, Vol. 32, H. 1-4. pp. 389-409.

Full text not available from this repository.

Official URL: http://edoc.unibas.ch/dok/A5839470

Downloads: Statistics Overview


Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Bibsysno:Link to catalogue
Publisher:North-Holland
ISSN:0167-9317
Note:Publication type according to Uni Basel Research Database: Journal article
Identification Number:
Last Modified:14 Sep 2012 07:18
Deposited On:14 Sep 2012 06:43

Repository Staff Only: item control page