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A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout

Battiston, F. M. and Ramseyer, J. P. and Lang, H. P. and Baller, M. K. and Gerber, C. and Gimzewski, J. K. and Meyer, E. and Guntherodt, H. J.. (2001) A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout. Sensors and actuators. B, Chemical, Vol. 77, H. 1-2. pp. 122-131.

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Official URL: http://edoc.unibas.ch/dok/A5262147

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Abstract

We present a chemical sensor based on a microfabricated array of eight silicon cantilevers actuated at their resonance-frequency and functionalized by polymer coatings. The operating principle relies on transduction of chemical or physical processes into a mechanical response. After exposure to analyte vapor, analyte molecules diffuse into the cantilever coating, which begins to swell. Jointly with the mass increase, a change of interfacial stress between coating and cantilever occurs, resulting in a bending of the cantilevers. Our setup allows the simultaneous detection of cantilever oscillation and bending of eight cantilevers by time-multiplexed optical beam deflection readout. The ac component of the cantilever response is demodulated, and the cantilever resonance-frequency is tracked by a custom-built phase-locked loop. By filtering out the ac component (oscillation), the de signal (bending) is extracted, yielding information on mass as well as surface stress changes simultaneously. Detection results of water, primary alcohols, alkanes and perfumes are presented.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Bibsysno:Link to catalogue
Publisher:Elsevier
ISSN:0925-4005
Note:Publication type according to Uni Basel Research Database: Journal article
Identification Number:
Last Modified:22 Mar 2012 14:27
Deposited On:22 Mar 2012 13:58

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