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Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants

Lee, D. W. and Kang, J. H. and Gysin, U. and Rast, S. and Meyer, E. and Despont, M. and Gerber, C.. (2005) Fabrication and evaluation of single-crystal silicon cantilevers with ultra-low spring constants. Journal of micromechanics and microengineering, Vol. 15, H. 11. pp. 2179-2183.

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Official URL: http://edoc.unibas.ch/dok/A5262116

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Abstract

We successfully fabricated single-crystal silicon cantilevers with spring constants as low as 10(-5) N m(-1) for use in magnetic resonance force microscopy applications. The fabricated ultra-thin silicon cantilevers had thicknesses ranging from 200 to 400 nm, lengths ranging from 340 to 450 mu m and a width of 5 mu m. We characterized their force sensitivity in the vacuum range from ambient pressure to 10(-3) Pa and the temperature range from 15 to 300 K. A minimum value is observed for the internal friction, Q(-1), at 160 K, which corresponds to an activation peak due to phonon scattering by atomic-scale defects. The best force sensitivity was achieved at 20 K, where it was increased by a factor of 10 as compared to that observed at room temperature.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Bibsysno:Link to catalogue
Publisher:IOP
ISSN:0960-1317
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:22 Mar 2012 14:27
Deposited On:22 Mar 2012 13:58

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