Switchable cantilever fabrication for a novel time-of-flight scanning force microscope

Lee, D. W. and Despont, M. and Drechsler, U. and Gerber, C. and Vettiger, P. and Wetzel, A. and Bennewitz, R. and Meyer, E.. (2003) Switchable cantilever fabrication for a novel time-of-flight scanning force microscope. Microelectronic engineering, Vol. 67-68. pp. 635-643.

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Official URL: http://edoc.unibas.ch/dok/A5262129

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We describe a cantilever device for a novel time-of-flight scanning force microscopy (TOF-SFM) concept. The cantilever device consists of a switchable cantilever (SC), a microfabricated extraction electrode, and an Interlocking microstage. It allows quasi-simultaneous topographical and chemical imaging of a sample surface to be performed in the same way as with conventional scanning probe techniques. This is achieved by the micromachined SC with a bimorph actuator that provides a reasonable switching speed. Secondly, a short tip-electrode distance to minimize the ion extraction voltage can be realized by the help of the Interlock type assembling. The measured SC tip deflection is similar to 100 mum at 35 mW, corresponding to an estimated heater temperature of similar to 250 degreesC. The maximum switching speed between the two modes is similar to 50 ms, and the sensitivity DeltaR/R of an integrated piezoresistive deflection sensor is similar to 6.7 X 10(-7) /nm. The tip-electrode distance is only 10 mm. The TOF-SFM system is currently being integrated in an ultra-high-vacuum system to perform first experiments.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Publisher:North-Holland Elsevier
Note:Publication type according to Uni Basel Research Database: Journal article
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Last Modified:22 Mar 2012 14:27
Deposited On:22 Mar 2012 13:56

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