edoc

Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy

Kawai, Yusuke and Ono, Takahito and Esashi, Masayoshi and Meyer, Ernst and Gerber, Christoph. (2007) Resonator combined with a piezoelectric actuator for chemical analysis by force microscopy. Review of scientific instruments, Vol. 78, H. 6 , 063709, 4 S..

Full text not available from this repository.

Official URL: http://edoc.unibas.ch/dok/A5262105

Downloads: Statistics Overview

Abstract

A high frequency silicon resonator for dynamic scanning force microscopy is combined with an integrated piezoelectric actuation element for large displacements. A high resonance frequency is required for imaging on the nanometer scale, and a large displacement is needed for the chemical analysis of the material at the end of the probe. The small piezoelectric resonator is formed at the end of a long piezoelectric actuator using a silicon micromachining technology. The resonator can be oscillated at 96.4 kHz, and the actuator generates a maximum displacement of 15 mu m at the end of the probe. The dynamic-mode scanning force microscopy capability, using the integrated piezoelectric resonator, is demonstrated on a 2 mu m pitch Au grating.
Faculties and Departments:05 Faculty of Science > Departement Physik > Physik > Nanomechanik (Meyer)
UniBasel Contributors:Meyer, Ernst
Item Type:Article, refereed
Article Subtype:Research Article
Bibsysno:Link to catalogue
Publisher:American Institute of Physics
ISSN:0034-6748
Note:Publication type according to Uni Basel Research Database: Journal article
Related URLs:
Identification Number:
Last Modified:22 Mar 2012 14:27
Deposited On:22 Mar 2012 13:55

Repository Staff Only: item control page